(19)
(11)
EP 2 678 634 A1
(12)
(43)
Date of publication:
01.01.2014
Bulletin 2014/01
(21)
Application number:
11706450.1
(22)
Date of filing:
24.02.2011
(51)
International Patent Classification (IPC):
G01B
11/06
(2006.01)
G01B
11/245
(2006.01)
G01B
21/04
(2006.01)
(86)
International application number:
PCT/US2011/025979
(87)
International publication number:
WO 2012/115643
(
30.08.2012
Gazette 2012/35)
(84)
Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
(71)
Applicant:
Corning Incorporated
Corning, New York 14831 (US)
(72)
Inventor:
MOLL, Johannes
Corning, New York 14830 (US)
(74)
Representative:
Greene, Simon Kenneth
Elkington and Fife LLP Prospect House 8 Pembroke Road
Sevenoaks Kent TN13 1XR
Sevenoaks Kent TN13 1XR (GB)
(54)
METHODS AND APPARATUS FOR THE MEASUREMENT OF FILM THICKNESS