(19)
(11) EP 2 678 634 A1

(12)

(43) Date of publication:
01.01.2014 Bulletin 2014/01

(21) Application number: 11706450.1

(22) Date of filing: 24.02.2011
(51) International Patent Classification (IPC): 
G01B 11/06(2006.01)
G01B 11/245(2006.01)
G01B 21/04(2006.01)
(86) International application number:
PCT/US2011/025979
(87) International publication number:
WO 2012/115643 (30.08.2012 Gazette 2012/35)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(71) Applicant: Corning Incorporated
Corning, New York 14831 (US)

(72) Inventor:
  • MOLL, Johannes
    Corning, New York 14830 (US)

(74) Representative: Greene, Simon Kenneth 
Elkington and Fife LLP Prospect House 8 Pembroke Road
Sevenoaks Kent TN13 1XR
Sevenoaks Kent TN13 1XR (GB)

   


(54) METHODS AND APPARATUS FOR THE MEASUREMENT OF FILM THICKNESS