| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
04.03.2011 US 201161449381 P
|
| (71) |
Applicant: ASML Netherlands BV |
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5504 DR Veldhoven (NL) |
|
| (72) |
Inventors: |
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- BANINE, Vadim
NL-5751 SB Deurne (NL)
- LOOPSTRA, Erik
NL-5613 ES Eindhoven (NL)
- MOORS, Roel
NL-5709 MT Helmond (NL)
- VAN SCHOOT, Jan
NL-5632 XN Eindhoven (NL)
- SWINKELS, Gerardus
NL-5623 LT Eindhoven (NL)
- YAKUNIN, Andrei
NL-5731 KA Mierlo (NL)
- VAN DIJSSELDONK, Antonius
NL-5527 BH Hapert (NL)
- DE BOEIJ, Wilhelmus
NL-5508 TL Veldhoven (NL)
|
| (74) |
Representative: Siem, Max Yoe Shé |
|
ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL) |
|
