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EP 2 683 518 A1

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(43) Date of publication: 15.01.2014 Bulletin 2014/03 (21) Application number: 11860597.1 (22) Date of filing: 10.03.2011

(51) International Patent Classification (IPC):  B23K 26/18(2006.01) B23K 26/04(2006.01) B23K 103/10(2006.01) B23K 26/36(2006.01) H01S 3/10(2006.01) (86) International application number: PCT/US2011/027946 (87) International publication number: WO 2012/121734 (13.09.2012 Gazette 2012/37)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (71) Applicant: Electro Scientific Industries, Inc. Portland, OR 97229 (US)	(72) Inventors: ZHANG, Haibin Portland, Oregon 97225 (US) SIMENSON, Glenn Portland, Oregon 97225 (US) LEONARD, Patrick Ann Arbor, Michigan 48103 (US) (74) Representative: McCrann, Sarah Ann et al Harrison Goddard Foote LLP 8th Floor 140 London Wall London EC2Y 5DN London EC2Y 5DN (GB)