(19)
(11) EP 2 688 712 A1

(12)

(43) Date of publication:
29.01.2014 Bulletin 2014/05

(21) Application number: 12760262.1

(22) Date of filing: 20.03.2012
(51) International Patent Classification (IPC): 
B24B 7/04(2006.01)
(86) International application number:
PCT/US2012/029837
(87) International publication number:
WO 2012/129244 (27.09.2012 Gazette 2012/39)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 21.03.2011 US 201161454893 P

(71) Applicant: Lawrence Livermore National Security, LLC
Livermore, CA 94550 (US)

(72) Inventors:
  • SURATWALA, Tayyab I.
    Livermore California 94550 (US)
  • STEELE, William A.
    Livermore California 94550 (US)
  • FEIT, Michael D.
    Livermore California 94550 (US)
  • DESJARDIN, Richard P.
    Livermore California 94550 (US)
  • MASON, Daniel C.
    Livermore California 94550 (US)
  • DYLLA-SPEARS, Rebecca J.
    Livermore California 94550 (US)
  • WONG, Lana L.
    Livermore California 94550 (US)
  • MILLER, Philip E.
    Livermore California 94550 (US)
  • GERAGHTY, Paul
    Livermore California 94550 (US)
  • BUDE, Jeffrey D.
    Livermore California 94550 (US)

(74) Representative: Diehl & Partner GbR 
Patentanwälte Erika-Mann-Strasse 9
80636 München
80636 München (DE)

   


(54) METHOD AND SYSTEM FOR CONVERGENT POLISHING