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EP 2 692 028 A1

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(43) Date of publication: 05.02.2014 Bulletin 2014/06 (21) Application number: 12712376.8 (22) Date of filing: 17.02.2012

(51) International Patent Classification (IPC):  H01S 3/02(2006.01) G03F 7/20(2006.01) H01S 3/23(2006.01) G02B 7/00(2006.01) (86) International application number: PCT/JP2012/054477 (87) International publication number: WO 2012/132675 (04.10.2012 Gazette 2012/40)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 30.03.2011 JP 2011076294 22.07.2011 JP 2011160656 24.11.2011 JP 2011256489 (71) Applicant: Gigaphoton Inc. Tochigi 323-8558 (JP)	(72) Inventors: KAWASUJI, Yasufumi Oyama-shi, Tochigi 323-8558 (JP) WAKABAYASHI, Osamu Hiratsuka-shi, Kanagawa 254-8555 (JP) FUJIMOTO, Junichi Oyama-shi, Tochigi 323-8558 (JP) IWASE, Hideo Utsunomiya-shi, Tochigi 320-0811 (JP) (74) Representative: Hards, Andrew  Global IP Europe Patentanwaltskanzlei Pfarrstrasse 14 80538 München 80538 München (DE)