(19)

(11)

EP 2 694 619 A1

(12)

(43) Date of publication: 12.02.2014 Bulletin 2014/07 (21) Application number: 12779767.8 (22) Date of filing: 03.05.2012

(51) International Patent Classification (IPC):  C09K 11/06(2006.01) H01L 51/54(2006.01) C07D 409/14(2006.01) H01L 27/32(2006.01) C07D 407/14(2006.01) C07D 403/04(2006.01) C07D 403/10(2006.01) (86) International application number: PCT/KR2012/003472 (87) International publication number: WO 2012/150826 (08.11.2012 Gazette 2012/45)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 03.05.2011 KR 20110041819 02.05.2012 KR 20120046340 (71) Applicant: Rohm And Haas Electronic Materials Korea Ltd. Cheonan-si, Chungcheongnam-do 331-980 (KR)

(72) Inventors: KIM, Chi-Sik Gyeonggi-do 445-752 (KR) YANG, Soo-Jin Gyeonggi-do 445-794 (KR) KIM, Hee-Sook Gyeonggi-do 443-390 (KR) PARK, Kyoung-Jin Gyeonggi-do 462-838 (KR) KIM, Seung-Ae Gyeonggi-do 431-845 (KR) LEE, Kyung-Joo Seoul 121-773 (KR) KWON, Hyuck-Joo Seoul 135-090 (KR) KIM, Bong-Ok Seoul 135-090 (KR) (74) Representative: Buckley, Guy Julian  Patent Outsourcing Limited 1 King Street Bakewell Derbyshire DE45 1DZ Bakewell Derbyshire DE45 1DZ (GB)