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(11)

EP 2 694 802 A1

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(43) Date of publication: 12.02.2014 Bulletin 2014/07 (21) Application number: 11711913.1 (22) Date of filing: 04.04.2011

(51) International Patent Classification (IPC):  F03B 13/00(2006.01) H01L 35/30(2006.01) (86) International application number: PCT/EP2011/055197 (87) International publication number: WO 2012/136243 (11.10.2012 Gazette 2012/41)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (71) Applicant: Greenteg Gmbh C/o Eth Zürich, Micro-& Nanosystems 8092 Zürich (CH)	(72) Inventors: GLATZ, Wulf CH-8005 Zürich (CH) STEIN, Peter CH-8004 Zürich (CH) VOGEL, Robert CH-6044 Udligenswil (CH) (74) Representative: Schneider Feldmann AG Patent- und Markenanwälte  Beethovenstrasse 49 Postfach 2792 8022 Zürich 8022 Zürich (CH)