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(11)

EP 2 694 944 A1

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(43) Date of publication: 12.02.2014 Bulletin 2014/07 (21) Application number: 12721573.9 (22) Date of filing: 05.04.2012

(51) International Patent Classification (IPC):  G01N 5/02(2006.01) G01N 5/04(2006.01) H01L 21/66(2006.01) (86) International application number: PCT/GB2012/050776 (87) International publication number: WO 2012/137013 (11.10.2012 Gazette 2012/41)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 07.04.2011 GB 201105953 (71) Applicant: Metryx Limited Bristol BS32 4SH (GB)	(72) Inventor: KIERMASZ, Adrian Bristol BS32 4SH (GB) (74) Representative: Johnson, Richard Alan et al Mewburn Ellis LLP 33 Gutter Lane London EC2V 8AS London EC2V 8AS (GB)