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EP 2 697 216 A1

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(43) Date of publication: 19.02.2014 Bulletin 2014/08 (21) Application number: 12771699.1 (22) Date of filing: 12.04.2012

(51) International Patent Classification (IPC):  C07D 401/14(2006.01) H01L 27/32(2006.01) C07F 7/10(2006.01) C07D 403/14(2006.01) H05B 33/14(2006.01) C07D 409/14(2006.01) C07D 401/04(2006.01) H01L 51/54(2006.01) C09K 11/06(2006.01) C07D 405/14(2006.01) (86) International application number: PCT/KR2012/002762 (87) International publication number: WO 2012/141499 (18.10.2012 Gazette 2012/42)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 12.04.2011 KR 20110033910 (71) Applicant: Rohm And Haas Electronic Materials Korea Ltd. Chungcheongnam-do 331-980 (KR)

(72) Inventors: AHN, Hee-choon Suwon-si Gyeonggi-do 443-400 (KR) YOON, Seok-keun Suwon-si Gyeonggi-do 443-390 (KR) KIM, Hee-sook Suwon-si Gyeonggi-do 443-390 (KR) YANG, Soo-jin Hwaseong-si Gyeonggi-do 445-794 (KR) LEE, Kyung-joo Seoul 121-773 (KR) KIM, Nam-kyun Yongin-si Gyeonggi-do 448-130 (KR) CHO, Young-jun Seongnam-si Gyeonggi-do 463-892 (KR) KWON, Hyuck-joo Seoul 135-877 (KR) KIM, Bong-ok Seoul 135-877 (KR) (74) Representative: Buckley, Guy Julian  Patent Outsourcing Limited 1 King Street Bakewell Derbyshire DE45 1DZ Bakewell Derbyshire DE45 1DZ (GB)