(19)
(11) EP 2 702 204 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
21.09.2016 Bulletin 2016/38

(45) Mention of the grant of the patent:
20.07.2016 Bulletin 2016/29

(21) Application number: 12723551.3

(22) Date of filing: 27.04.2012
(51) International Patent Classification (IPC): 
G01N 21/86(2006.01)
G01N 33/34(2006.01)
 G01N 21/89(2006.01)
D21G 9/00(2006.01)
(86) International application number:
PCT/US2012/035385
(87) International publication number:
WO 2012/149269 (01.11.2012 Gazette 2012/44)

(54)

DETERMINATION OF CD AND MD VARIATIONS FROM SCANNING MEASUREMENTS OF A SHEET OF MATERIAL

BESTIMMUNG VON CD- UND/ODER MD-VARIATIONEN AUS ABTASTUNGSMESSUNGEN EINER MATERIALBAHN

DÉTERMINATION DE VARIATIONS CD ET MD À PARTIR DE MESURES DE BALAYAGE D'UNE FEUILLE DE MATIÈRE

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 28.04.2011 US 201161480249 P

(43) Date of publication of application:
05.03.2014 Bulletin 2014/10

(60) Divisional application:
14171182.0 / 2792788

(73) Proprietor: ABB Schweiz AG
5400 Baden (CH)

(72) Inventor:
  • CHEN, Shih-Chin
    Dublin, OH 43017 (US)

(74) Representative: ABB Patent Attorneys 
c/o ABB Schweiz AG Intellectual Property CH-IP Brown Boveri Strasse 6
5400 Baden
5400 Baden (CH)


(56) References cited: : 
EP-A1- 1 665 981
US-A- 4 910 688
 EP-A1- 1 768 108
US-A1- 2011 082 692
   
  • "Spectral density estimation", Wikipedia , 25 February 2008 (2008-02-25), XP002679604, Retrieved from the Internet: URL:http://web.archive.org/web/20080303134 910/http://en.wikipedia.org/wiki/Spectral_ density_estimation [retrieved on 2008-03-03]
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).