(19)

(11)

EP 2 702 607 A2

(12)

(88) Date of publication A3: 17.01.2013 (43) Date of publication: 05.03.2014 Bulletin 2014/10 (21) Application number: 12776905.7 (22) Date of filing: 25.04.2012

(51) International Patent Classification (IPC):  H01L 21/60(2006.01) (86) International application number: PCT/US2012/034912 (87) International publication number: WO 2012/148967 (01.11.2012 Gazette 2012/44)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 25.04.2011 US 201161478582 P (71) Applicant: Air Products and Chemicals, Inc. Allentown, PA 18195-1501 (US)	(72) Inventors: COLLIER, Terence Quintin Rowlett Texas 75088 (US) RENNIE, David Barry Bethlehem Pennsylvania 18017 (US) RAMAMURTHI, Rajkumar Cave Creek Arizona 85331 (US) PARRIS, Gene Everad Coopersburg Pennsylvania 18036 (US) (74) Representative: Muir, Benjamin M. J.  Beck Greener Fulwood House 12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB)