Hermetically Glass Sealed Pressure Sensor

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(11)

EP 2 708 866 A8

(12)	CORRECTED EUROPEAN PATENT APPLICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 A1)

(48)	Corrigendum issued on:
	16.03.2016 Bulletin 2016/11

(88)	Date of publication A3:
	19.03.2014 Bulletin 2014/12

(43)	Date of publication:
	19.03.2014 Bulletin 2014/12

(21)	Application number: 13184454.0

(22)	Date of filing: 13.09.2013

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International Patent Classification (IPC):

G01L 19/04^(2006.01)

G01L 19/14^(2006.01)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

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Priority:

14.09.2012 US 201213615764

(71)	Applicant: Sensata Technologies, Inc.
	Attleboro, MA 02703 (US)

(72)	Inventors:
	Hop, Erik 7311 JP Apeldoorn (NL) Klaasse 7335 JN Apeldoorn (NL) Slaakhorst 7706 EW Almelo (NL) Hopman, Wico 7523 ZL Enschede (NL) Van den Bosch, Arnout 7561 BV Deurningen (NL)

(74)	Representative: Legg, Cyrus James Grahame et al
	Abel & Imray 20 Red Lion Street London WC1R 4PQ London WC1R 4PQ (GB)

(54)	Hermetically Glass Sealed Pressure Sensor

(57) Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor (130) for pressure measurement. The MEMS sensor (130) is attached to a glass tube (120)which is compressively sealed to a mounting frame (105) that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube (120) and the mounting frame and a rigid seal (140) between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor.