(19)

(11)

EP 2 710 628 A2

(12)

(88) Date of publication A3: 21.03.2013 (43) Date of publication: 26.03.2014 Bulletin 2014/13 (21) Application number: 12785480.0 (22) Date of filing: 17.05.2012

(51) International Patent Classification (IPC):  H01L 21/31(2006.01) (86) International application number: PCT/US2012/038280 (87) International publication number: WO 2012/158876 (22.11.2012 Gazette 2012/47)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 19.05.2011 US 201113111735 (71) Applicant: Laird Technologies, Inc. Earth City, MO 63045 (US)	(72) Inventors: BRUZDA, Karen, J. Cleveland OH 44102 (US) HILL, Richard, F. Parkman OH 44080 (US) JONES, Brian Warren OH 44485 (US) CRAIG, Michael, D. Painesville OH 44077 (US) (74) Representative: Edlund, Fabian  Awapatent AB P.O. Box 11 394 404 28 Göteborg 404 28 Göteborg (SE)