(19)

(11)

EP 2 710 630 A1

(12)

(43) Date of publication: 26.03.2014 Bulletin 2014/13 (21) Application number: 11866365.7 (22) Date of filing: 20.05.2011

(51) International Patent Classification (IPC):  H01L 21/60(2006.01) H05K 3/34(2006.01) B23K 3/06(2006.01) (86) International application number: PCT/CN2011/074378 (87) International publication number: WO 2012/159241 (29.11.2012 Gazette 2012/48)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (71) Applicant: Linde Aktiengesellschaft 80331 Munich (DE)	(72) Inventor: FENG, Edward Pudong Shanghai 200129 (CN) (74) Representative: Gellner, Bernd  Linde AG Legal Services Intellectual Property Dr.-Carl-von-Linde-Strasse 6-14 82049 Pullach 82049 Pullach (DE)