(19)

(11)

EP 2 715 779 A2

(12)

(88) Date of publication A3: 16.05.2013 (43) Date of publication: 09.04.2014 Bulletin 2014/15 (21) Application number: 12720807.2 (22) Date of filing: 10.05.2012

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) B08B 3/04(2006.01) H01L 21/67(2006.01) B08B 3/08(2006.01) (86) International application number: PCT/EP2012/002006 (87) International publication number: WO 2012/159710 (29.11.2012 Gazette 2012/48)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 21.05.2011 EP 11004217 (71) Applicant: Meyer Burger Technology AG 3600 Thun (CH)	(72) Inventor: RICHTER, André CH-3600 Thun (CH) (74) Representative: Patentbüro Paul Rosenich AG  BGZ 9497 Triesenberg 9497 Triesenberg (LI)