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(11)

EP 2 718 478 A1

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(43) Date of publication: 16.04.2014 Bulletin 2014/16 (21) Application number: 11729057.7 (22) Date of filing: 08.06.2011

(51) International Patent Classification (IPC):  C23C 18/08(2006.01) (86) International application number: PCT/EP2011/002806 (87) International publication number: WO 2012/167804 (13.12.2012 Gazette 2012/50)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (71) Applicant: King Saud University 11421 Riyadh (SA)	(72) Inventors: SIDDIQUI, Mohammed Rafiq Hussain 11451 Riyadh (SA) AL-WARTHAN, Abdulrahman 11451 Riyadh (SA) ADIL, Syed Farooq 11451 Riyadh (SA) (74) Representative: Goddar, Heinz J.  Boehmert & Boehmert Pettenkoferstrasse 20-22 80336 München 80336 München (DE)