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(11)

EP 2 718 963 A2

(12)

(88) Date of publication A3: 25.04.2013 (43) Date of publication: 16.04.2014 Bulletin 2014/16 (21) Application number: 12796599.4 (22) Date of filing: 17.05.2012

(51) International Patent Classification (IPC):  H01L 21/205(2006.01) C23C 16/44(2006.01) (86) International application number: PCT/US2012/038256 (87) International publication number: WO 2012/170166 (13.12.2012 Gazette 2012/50)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 09.06.2011 US 201113156465 (71) Applicant: Singulus MOCVD GmbH i. Gr. 63796 Kahl am Main (DE)	(72) Inventors: SFERLAZZO, Piero Marblehead, Massachusetts 01945 (US) LAMPROS, Thomas Michael Cambridge, New York 12816 (US) (74) Representative: Harding, Andrew Philip  Forresters Skygarden Erika-Mann-Strasse 11 80636 München 80636 München (DE)