Method for the preparation of a multi-layered crystalline structure

(19)

(11)

EP 2 733 735 A3

(12)	EUROPEAN PATENT APPLICATION

(88)	Date of publication A3:
	23.07.2014 Bulletin 2014/30

(43)	Date of publication A2:
	21.05.2014 Bulletin 2014/21

(21)	Application number: 14154849.5

(22)	Date of filing: 22.12.2010

(51)

International Patent Classification (IPC):

H01L 21/762^(2006.01)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME

(30)

Priority:

30.12.2009 US 290961 P

(62)	Application number of the earlier application in accordance with Art. 76 EPC:
	10801778.1 / 2519965

(71)	Applicant: MEMC Electronic Materials, Inc.
	St. Peters, MO 63376 (US)

(72)	Inventors:
	Witte, Dale A. St. Peters, MO Missouri 63376 (US) Libbert, Jeffrey L. St. Peters, MO Missouri 63376 (US)

(74)	Representative: Maiwald Patentanwalts GmbH
	Elisenhof Elisenstrasse 3 80335 München 80335 München (DE)

(54)	Method for the preparation of a multi-layered crystalline structure

(57) This invention generally relates to a process for making a multi-layered crystalline structure. The process includes implanting ions into a donor structure, bonding the implanted donor structure to a second structure to form a bonded structure, cleaving the bonded structure, and removing any residual portion of the donor structure from the finished multi-layered crystalline structure.

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