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(11)

EP 2 742 385 A2

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(88) Date of publication A3: 11.07.2013 (43) Date of publication: 18.06.2014 Bulletin 2014/25 (21) Application number: 12822200.7 (22) Date of filing: 10.08.2012

(51) International Patent Classification (IPC):  G03F 7/004(2006.01) G03F 7/09(2006.01) G03F 7/038(2006.01) C09J 133/14(2006.01) G03F 7/039(2006.01) C09D 133/04(2006.01) G03F 7/095(2006.01) (86) International application number: PCT/US2012/050267 (87) International publication number: WO 2013/023124 (14.02.2013 Gazette 2013/07)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 10.08.2011 US 201113206796 (71) Applicant: International Business Machines Corporation Armonk, NY 10504 (US)

(72) Inventors: CHEN, Kuang-jung Hopewell Junction, NY 12533 (US) HOLMES, Steven, J. Hopewell Junction, NY 12533 (US) HUANG, Wu-song Hopewell Junction, NY 12533 (US) LIU, Sen Hopewell Junction, NY 12533 (US) (74) Representative: Williams, Julian David  IBM United Kingdom Limited Intellectual Property Department Mail Point 110 Hursley Park Winchester Hampshire SO21 2JN Hursley Park Winchester Hampshire SO21 2JN (GB) (56) References cited: :