(19)

(11)

EP 2 745 306 A1

(12)

(43) Date of publication: 25.06.2014 Bulletin 2014/26 (21) Application number: 11761395.0 (22) Date of filing: 16.08.2011

(51) International Patent Classification (IPC):  H01J 37/32(2006.01) C23C 16/509(2006.01) (86) International application number: PCT/GB2011/051548 (87) International publication number: WO 2013/024235 (21.02.2013 Gazette 2013/08)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (71) Applicant: P2i Ltd Abingdon, Oxfordshire OX14 4SA (GB)	(72) Inventor: KING, Charles Edmund Abingdon Oxfordshire OX14 4SA (GB) (74) Representative: Glansdorp, Freija Gwendolyn  Greaves Brewster LLP Copa House Station Road Cheddar Somerset BS27 3AH Somerset BS27 3AH (GB)