(19)

(11)

EP 2 748 849 A2

(12)

(88) Date of publication A3: 24.10.2013 (43) Date of publication: 02.07.2014 Bulletin 2014/27 (21) Application number: 12854047.3 (22) Date of filing: 24.08.2012

(51) International Patent Classification (IPC):  H01L 21/8238(2006.01) H01L 21/205(2006.01) H01L 21/20(2006.01) (86) International application number: PCT/US2012/052264 (87) International publication number: WO 2013/081694 (06.06.2013 Gazette 2013/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 25.08.2011 US 201113218308 25.08.2011 US 201113218273 25.08.2011 US 201113218335 25.08.2011 US 201113218345 25.08.2011 US 201113218352 25.08.2011 US 201113218292 (71) Applicant: Aeroflex Colorado Springs Inc. Colorado Springs CO 80907-3486 (US)

(72) Inventors: KERWIN, David B. Colorado Springs, Colorado 80919 (US) BENEDETTO, Joseph M. Monument, Colorado 80132 (US) (74) Representative: Freeman, Jacqueline Carol  WP Thompson 55 Drury Lane London WC2B 5SQ London WC2B 5SQ (GB)