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EP 2 761 656 A1

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(43) Date of publication: 06.08.2014 Bulletin 2014/32 (21) Application number: 11873357.5 (22) Date of filing: 27.09.2011

(51) International Patent Classification (IPC):  H01L 27/115(2006.01) H01L 21/8247(2006.01) (86) International application number: PCT/US2011/053488 (87) International publication number: WO 2013/048376 (04.04.2013 Gazette 2013/14)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (71) Applicant: Hewlett-Packard Development Company, L.P. Houston, TX 77070 (US)	(72) Inventors: GE, Ning Singapore 109673 (SG) MIKULAN, Paul I. Carlton, Texas 75006 (US) PEH, Bee Ling Singapore 109673 (SG) (74) Representative: Zimmermann, Tankred Klaus et al Schoppe, Zimmermann Stöckeler & Zinkler & Partner Patentanwälte Postfach 246 82043 Pullach bei München 82043 Pullach bei München (DE)