(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
(30) |
Priority: |
05.10.2011 EP 11183991
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(71) |
Applicant: Atotech Deutschland GmbH |
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10553 Berlin (DE) |
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(72) |
Inventors: |
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- STEINHÄUSER, Edith
10315 Berlin (DE)
- RÖSELER, Sandra
13125 Berlin (DE)
- WIESE, Stefanie
10825 Berlin (DE)
- NGUYEN, Tang, Cam, Lai
13158 Berlin (DE)
- STAMP, Lutz
13509 Berlin (DE)
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(74) |
Representative: Patentanwälte Bressel und Partner mbB |
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Potsdamer Platz 10 10785 Berlin 10785 Berlin (DE) |
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