(19)
(11) EP 2 764 357 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
26.08.2020 Bulletin 2020/35

(45) Mention of the grant of the patent:
22.04.2020 Bulletin 2020/17

(21) Application number: 12761657.1

(22) Date of filing: 11.07.2012
(51) International Patent Classification (IPC): 
G01N 30/60(2006.01)
B81C 1/00(2006.01)
 B01D 15/22(2006.01)
(86) International application number:
PCT/IB2012/053544
(87) International publication number:
WO 2013/008191 (17.01.2013 Gazette 2013/03)

(54)

METHOD FOR MAKING A SILICON SEPARATION MICROCOLUMN FOR CHROMATOGRAPHY OR GAS CHROMATOGRAPHY

VERFAHREN ZUM HERSTELLEN EINER SILICIUMTRENNUNGSMIKROSÄULE FÜR CHROMATOGRAPHIE ODER GASCHROMATOGRAPHIE

PROCÉDÉ DE FABRICATION D'UNE MICROCOLONNE DE SÉPARATION EN SILICIUM POUR CHROMATOGRAPHIE OU CHROMATOGRAPHIE EN PHASE GAZEUSE

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 12.07.2011 IT BO20110414

(43) Date of publication of application:
13.08.2014 Bulletin 2014/33

(73) Proprietor: Pollution S.r.l.
40054 Budrio (IT)

(72) Inventors:
  • MANCARELLA, Fulvio
    I-40129 Bologna (IT)
  • ELMI, Ivan
    I-40129 Bologna (IT)
  • ZAMPOLLI, Stefano
    I-40129 Bologna (IT)
  • POGGI, Antonella
    I-40129 Bologna (IT)
  • CARDINALI, Giancarlo
    I-40129 Bologna (IT)
  • BELLUCE, Maddalena
    I-40129 Bologna (IT)
  • GALLI, Stefano
    I-20025 Legnano (IT)
  • GALLI, Mario
    I-20025 Legnano (IT)
  • BARAVELLI, Filippo
    I-40054 Budrio (IT)

(74) Representative: Ruzzu, Giammario 
Via Gulli, 5
40068 San Lazzaro di Savena (BO)
40068 San Lazzaro di Savena (BO) (IT)


(56) References cited: : 
US-A- 5 690 841
US-B1- 7 157 004
 US-A- 6 093 330
   
  • ADARSH D. RADADIA ET AL: "Partially Buried Microcolumns for Micro Gas Analyzers", ANALYTICAL CHEMISTRY, vol. 81, no. 9, 1 May 2009 (2009-05-01), pages 3471-3477, XP055011054, ISSN: 0003-2700, DOI: 10.1021/ac8027382
  • TJERKSTRA R W ET AL: "Etching technology for chromatography microchannels", ELECTROCHIMICA ACTA, ELSEVIER SCIENCE PUBLISHERS, BARKING, GB, vol. 42, no. 20-22, 1 January 1997 (1997-01-01), pages 3399-3406, XP004086710, ISSN: 0013-4686, DOI: 10.1016/S0013-4686(97)00193-X
  • Upchurch Scientific: "NanoPort Assemblies", Instructions for Use , 2008, page 1, XP002662648, UPCHURCH SCIENTIFIC Retrieved from the Internet: URL:http://www.upchurch.com/PDF/I-Cards/N4 .PDF [retrieved on 2011-11-02]
  • KOCH COREY, INGLE JAMES, REMCHO VINCENT: "Chips & Tips: Bonding Upchurch Nanoports to PDMS", Lab on a chip, 12 February 2008 (2008-02-12), pages 1-3, XP002662649, RCS publishing Retrieved from the Internet: URL:http://www.rsc.org/Publishing/Journals /lc/Chips_and_Tips/nanoport_bonding.asp [retrieved on 2011-11-02]
  • MEINT J DE BOER ET AL: "Micromachining of Buried Micro Channels in Silicon", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, US, vol. 9, no. 1, 1 March 2000 (2000-03-01), XP011034541, ISSN: 1057-7157
  • TJERKSTRA R W ET AL: "Etching technology for microchannels", PROCEEDINGS / MEMS 97 : THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS ; AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, NAGOYA, JAPAN, JANUARY 26-30, 1997, IEEE SERVICE CENTER, PISCATAWAY,, 26 January 1997 (1997-01-26), pages 147-152, XP010216895, DOI: 10.1109/MEMSYS.1997.581790 ISBN: 978-0-7803-3744-2
   
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