(19)

(11)

EP 2 773 790 A1

(12)

(43) Date of publication: 10.09.2014 Bulletin 2014/37 (21) Application number: 12769695.3 (22) Date of filing: 17.09.2012

(51) International Patent Classification (IPC):  C23C 14/06(2006.01) (86) International application number: PCT/FI2012/050897 (87) International publication number: WO 2013/038067 (21.03.2013 Gazette 2013/12)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 16.09.2011 FI 20115912 (71) Applicants: Picodeon Ltd Oy 00120 Helsinki (FI) Carbodeon Ltd Oy 01510 Vantaa (FI)	(72) Inventors: MYLLYMÄKI, Vesa 00200 Helsinki (FI) HÄYRYNEN, Jukka 00590 Helsinki (FI) KAUPPINEN, Mika 71800 Siilinjärvi (FI) (74) Representative: Vanhala, Jorma Kalevi  Berggren Oy Ab Sepänkatu 20 90100 Oulu 90100 Oulu (FI)