| (84) |
Designated Contracting States: |
|
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
18.11.2011 US 201161561493 P
26.03.2012 US 201261615709 P
26.03.2012 US 201261615660 P
|
| (71) |
Applicant: Advanced Technology Materials, Inc. |
|
Danbury, CT 06810 (US) |
|
| (72) |
Inventors: |
|
- WARE, Donald
Woodbury, Minnesota 55125 (US)
- BOTET, Alfredo Daniel
Avon, Connecticut 06001 (US)
- TOM, Glenn M.
Bloomington, Minnesota 55438 (US)
- NELSON, Greg
Minneapolis, Minnesota 55417 (US)
- MOWREY, Dale
Montgomery, Minnesota 56069 (US)
- HODGES, Jordan
Cedar Park, Texas 78613 (US)
|
| (74) |
Representative: Elsworth, Dominic Stephen |
|
Hargreaves Elsworth
14-18 Westgate Road
Newcastle-upon-Tyne NE1 3NN
Newcastle-upon-Tyne NE1 3NN (GB) |
|
