Pressure transducer substrate with self alignment feature

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(11)

EP 2 781 902 A8

(12)	CORRECTED EUROPEAN PATENT APPLICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 A1)

(48)	Corrigendum issued on:
	16.03.2016 Bulletin 2016/11

(88)	Date of publication A3:
	24.09.2014 Bulletin 2014/39

(43)	Date of publication:
	24.09.2014 Bulletin 2014/39

(21)	Application number: 14158388.0

(22)	Date of filing: 07.03.2014

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International Patent Classification (IPC):

G01L 9/00^(2006.01)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

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Priority:

07.03.2013 US 201313788255

(71)	Applicant: Sensata Technologies, Inc.
	Attleboro, MA 02703 (US)

(72)	Inventors:
	Hopman, Wico 7523 ZL Enschede (NL) Van Der Donk, George 7451 WE Holten (NL) Van Noorden, Maarten 7925 PK Linde (NL) Distefano, Sean Franklin, MA Massachusetts 02038 (US)

(74)	Representative: Legg, Cyrus James Grahame
	Abel & Imray 20 Red Lion Street London WC1R 4PQ London WC1R 4PQ (GB)

(54)	Pressure transducer substrate with self alignment feature

(57) In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.