(57) An X-ray analyzer is provided that rapidly obtain element distribution covering as
much as possible elements contained in a sample.
The X-ray analyzer generates a spectrum of X-rays obtained from an area on a sample
S where the intensity of X-rays whose energy is not included in an already set-up
ROI is high and then, from the generated spectrum, identifies a new element for which
an ROI is not set up. Further, the X-ray analyzer sets an ROI corresponding to the
identified element and then obtains element distribution. The X-ray analyzer repeats
generation of an X-ray spectrum, identification of an element, setting of an ROI,
and obtaining element distribution. This avoids unintended omission of setting of
an ROI and hence permits as-much-as-possible coverage of the elements in the sample
S. Further, distribution of a trace element is allowed to be obtained rapidly.
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