| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
26.04.2013 JP 2013094146
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| (43) |
Date of publication of application: |
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29.10.2014 Bulletin 2014/44 |
| (73) |
Proprietor: Shin-Etsu Chemical Co., Ltd. |
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Chiyoda-ku,
Tokyo 100-0004 (JP) |
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| (72) |
Inventor: |
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- Inokuchi, Yoshinori
Annaka-shi, Gunma 379-0224 (JP)
|
| (74) |
Representative: V.O. |
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P.O. Box 87930 2508 DH Den Haag 2508 DH Den Haag (NL) |
| (56) |
References cited: :
EP-A1- 2 182 023 EP-A2- 0 958 805
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EP-A1- 2 505 612
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