(19)

(11)

EP 2 801 107 A1

(12)

(43) Date of publication: 12.11.2014 Bulletin 2014/46 (21) Application number: 12848635.4 (22) Date of filing: 07.11.2012

(51) International Patent Classification (IPC):  H01L 21/66(2006.01) H01L 31/18(2006.01) B07C 5/34(2006.01) G01N 21/63(2006.01) (86) International application number: PCT/AU2012/001358 (87) International publication number: WO 2013/067573 (16.05.2013 Gazette 2013/20)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR (30) Priority: 07.11.2011 AU 2011904618 (71) Applicant: BT Imaging Pty Ltd Redfern NSW 2016 (AU)	(72) Inventors: TRUPKE, Thorsten Coogee NSW 2034 (AU) KROEZE, Roger Woolloomooloo NSW 2011 (AU) (74) Representative: Harrison, Robert John  24IP Law Group Sonnenberg Fortmann Patent- und Rechtsanwälte Herzogspitalstraße 10a 80331 München 80331 München (DE)