| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
15.05.2013 US 201361823625 P 24.01.2014 US 201414163407 24.01.2014 US 201414163518
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| (43) |
Date of publication of application: |
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19.11.2014 Bulletin 2014/47 |
| (73) |
Proprietor: Versum Materials US, LLC |
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Tempe, AZ 85284 (US) |
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| (72) |
Inventors: |
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- Birtcher, Charles Michael
Valley Center, CA California 92082 (US)
- Steidl, Thomas Andrew
Escondido, CA California 92025 (US)
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| (74) |
Representative: Beck Greener |
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Fulwood House
12 Fulwood Place London WC1V 6HR London WC1V 6HR (GB) |
| (56) |
References cited: :
EP-A2- 0 465 878 WO-A2-2009/063194 US-B1- 6 246 154
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EP-A2- 0 745 833 DE-A1- 10 159 359
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