| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
17.01.2012 US 201261587391 P
09.03.2012 US 720542
|
| (71) |
Applicant: MKS Instruments, Inc. |
|
Andover, MA 01810 (US) |
|
| (72) |
Inventors: |
|
- PHILLIPS, Charles, Mark
Sicklerville, NJ 08081 (US)
- MARSHIK-GEURTS, Barbara
Methuen, MA 01844 (US)
- KAMLET, Leonard, I.
Andover, MA 01810 (US)
- SPARTZ, Martin, L.
Ellington, CT 06029 (US)
- SAPTARI, Vidi
Cambridge, MA 02141 (US)
|
| (74) |
Representative: Lang, Johannes |
|
Bardehle Pagenberg Partnerschaft mbB
Patentanwälte, Rechtsanwälte
Prinzregentenplatz 7
81675 München
81675 München (DE) |
|
