(19)

(11)

EP 2 809 825 A2

(12)

(88) Date of publication A3: 10.07.2014 (43) Date of publication: 10.12.2014 Bulletin 2014/50 (21) Application number: 13701660.6 (22) Date of filing: 31.01.2013

(51) International Patent Classification (IPC):  C23C 18/36(2006.01) C23C 18/16(2006.01) C23C 18/54(2006.01) (86) International application number: PCT/EP2013/051889 (87) International publication number: WO 2013/113810 (08.08.2013 Gazette 2013/32)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 01.02.2012 EP 12153540 (71) Applicant: Atotech Deutschland GmbH 10553 Berlin (DE)	(72) Inventors: FELS, Carl, Christian 10967 Berlin (DE) DYRBUSCH, Brigitte 12207 Berlin (DE) (74) Representative: Wonnemann, Jörg  Atotech Deutschland GmbH Patent Management Erasmusstraße 20 10553 Berlin 10553 Berlin (DE)