(19)

(11)

EP 2 812 914 A1

(12)

(43) Date of publication: 17.12.2014 Bulletin 2014/51 (21) Application number: 12737821.4 (22) Date of filing: 23.07.2012

(51) International Patent Classification (IPC):  H01L 21/67(2006.01) B07C 5/344(2006.01) B07C 5/00(2006.01) (86) International application number: PCT/EP2012/064437 (87) International publication number: WO 2013/117246 (15.08.2013 Gazette 2013/33)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 07.02.2012 CH 161122012 (71) Applicant: ISMECA Semiconductor Holding SA 2300 La Chaux-de-Fonds (CH)	(72) Inventors: ROY, Philippe F-25650 Gilley (FR) VIVERGE, Philippe F-25210 Le Russey (FR) GRAU, Gérard CH-2054 Chézard (CH) (74) Representative: P&TS SA (AG, Ltd.)  Av. J.-J. Rousseau 4 P.O. Box 2848 2001 Neuchâtel 2001 Neuchâtel (CH)