| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
| (30) |
Priority: |
29.03.2012 EP 12075036
|
| (71) |
Applicant: Atotech Deutschland GmbH |
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10553 Berlin (DE) |
|
| (72) |
Inventors: |
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- TEWS, Dirk
10318 Berlin (DE)
- MICHALIK, Fabian
10317 Berlin (DE)
- GIL IBÀNEZ, Belen
10717 Berlin (DE)
- BRANDT, Lutz
10559 Berlin (DE)
- HSIEH, Meng Che
Lone Tree, 80124 Colorado (US)
- ZHIMING, Liu
Englewood, 80111 Colorado (US)
|
| (74) |
Representative: Wonnemann, Jörg |
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Atotech Deutschland GmbH
Patent Management
Erasmusstraße 20
10553 Berlin
10553 Berlin (DE) |
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