SPUTTERING TARGETS AND ASSOCIATED SPUTTERING METHODS FOR FORMING HERMETIC BARRIER LAYERS - Patent 2825685

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EP 2 825 685 A1

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(43)	Date of publication:
	21.01.2015 Bulletin 2015/04

(21)	Application number: 13712072.1

(22)	Date of filing: 13.03.2013

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International Patent Classification (IPC):

C23C 14/34^(2006.01)
H01J 37/34^(2006.01)

C23C 14/08^(2006.01)

(86)	International application number:
	PCT/US2013/030759

(87)	International publication number:
	WO 2013/138434 (19.09.2013 Gazette 2013/38)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME

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Priority:

14.03.2012 US 201261610695 P

(71)	Applicant: Corning Incorporated
	Corning, New York 14831 (US)

(72)	Inventors:
	AITKEN, Bruce, G Corning, NY 14830 (US) KOVAL, Shari, E Beaver Dams, NY 14812 (US) QUESADA, Mark, A Horseheads, NY 14845 (US)

(74)	Representative: Oldroyd, Richard Duncan
	Elkington and Fife LLP Prospect House 8 Pembroke Road Sevenoaks, Kent TN13 1XR Sevenoaks, Kent TN13 1XR (GB)

(54)	SPUTTERING TARGETS AND ASSOCIATED SPUTTERING METHODS FOR FORMING HERMETIC BARRIER LAYERS