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EP 2 828 883 A1

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(43) Date of publication: 28.01.2015 Bulletin 2015/05 (21) Application number: 13764357.3 (22) Date of filing: 06.03.2013

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) H01L 21/20(2006.01) H01L 21/205(2006.01) (86) International application number: PCT/US2013/029314 (87) International publication number: WO 2013/142054 (26.09.2013 Gazette 2013/39)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 20.03.2012 US 201261613062 P (71) Applicant: 3M Innovative Properties Company Saint Paul, MN 55133-3427 (US)	(72) Inventors: DRONEN, Blake R. Saint Paul, Minnesota 55133-3427 (US) MAHONEY, Wayne S. Saint Paul, Minnesota 55133-3427 (US) LARSON, Eric G. Saint Paul, Minnesota 55133-3427 (US) (74) Representative: Herzog, Fiesser & Partner Patentanwälte PartG mbB  Isartorplatz 1 80331 München 80331 München (DE)