(19)
(11) EP 2 831 917 A1

(12)

(43) Date of publication:
04.02.2015 Bulletin 2015/06

(21) Application number: 13767422.2

(22) Date of filing: 15.03.2013
(51) International Patent Classification (IPC): 
H01L 29/792(2006.01)
(86) International application number:
PCT/US2013/032339
(87) International publication number:
WO 2013/148343 (03.10.2013 Gazette 2013/40)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 31.03.2012 US 201213436872

(71) Applicant: Cypress Semiconductor Corporation
San Jose, CA 95134 (US)

(72) Inventors:
  • LEVY, Sagy
    30900 Zichron-Yoakev (IL)
  • RAMKUMAR, Krishnaswamy
    San Jose, California 95128 (US)
  • JENNE, Fredrick
    Sunnyvale, California 94086 (US)
  • GEHA, Sam
    Cupertino, California 95014 (US)

(74) Representative: Cooper, John 
Murgitroyd & Company Scotland House 165-169 Scotland Street
Glasgow G5 8PL
Glasgow G5 8PL (GB)

   


(54) OXIDE-NITRIDE-OXIDE STACK HAVING MULTIPLE OXYNITRIDE LAYERS