(19)

(11)

EP 2 852 968 A1

(12)

(43) Date of publication: 01.04.2015 Bulletin 2015/14 (21) Application number: 13794641.4 (22) Date of filing: 22.05.2013

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) B23K 26/12(2014.01) C23C 14/28(2006.01) G02B 27/00(2006.01) (86) International application number: PCT/FI2013/000025 (87) International publication number: WO 2013/175052 (28.11.2013 Gazette 2013/48)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 22.05.2012 FI 20120169 (71) Applicant: Arctic IP Investment AB 24240 Salo (FI)	(72) Inventors: KINNUNEN, Petteri FI-24240 Salo (FI) RUUTTU, Jari FI-24240 Salo (FI) (74) Representative: Kolster Oy Ab  Iso Roobertinkatu 23 PO Box 148 00121 Helsinki 00121 Helsinki (FI)