(19)

(11)

EP 2 855 731 A1

(12)

(43) Date of publication: 08.04.2015 Bulletin 2015/15 (21) Application number: 13727595.4 (22) Date of filing: 05.06.2013

(51) International Patent Classification (IPC):  C23C 18/20(2006.01) C23C 18/30(2006.01) C23C 18/24(2006.01) (86) International application number: PCT/EP2013/061568 (87) International publication number: WO 2013/182590 (12.12.2013 Gazette 2013/50)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 05.06.2012 LT 2012042 (71) Applicant: Atotech Deutschland GmbH 10553 Berlin (DE)	(72) Inventors: NARUSKEVICIUS, Leonas LT-10311 Vilnius (LT) BUDILOVSKIS, Danas LT-10221 Vilnius (LT) GYLIENE, Ona LT-07180 Vilnius (LT) TAMASAUSKAITE TAMASIUNAITE, Loreta LT-09216 Vilnius (LT) (74) Representative: Wonnemann, Jörg  Atotech Deutschland GmbH Patent Management Erasmusstraße 20 10553 Berlin 10553 Berlin (DE)