| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
01.06.2012 US 201261654112 P
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| (43) |
Date of publication of application: |
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08.04.2015 Bulletin 2015/15 |
| (73) |
Proprietor: Lumileds Holding B.V. |
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1118 BG Schiphol (NL) |
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| (72) |
Inventors: |
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- SINGH, Rajwinder
NL-5656 AE Eindhoven (NL)
- EPLER, John Edward
NL-5656 AE Eindhoven (NL)
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| (74) |
Representative: Rüber, Bernhard Jakob |
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Lumileds Germany GmbH
Intellectual Property
Philipsstraße 8 52068 Aachen 52068 Aachen (DE) |
| (56) |
References cited: :
EP-A1- 1 345 275 EP-A2- 2 597 687 US-A1- 2010 155 693
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EP-A2- 2 372 790 US-A1- 2006 202 216 US-A1- 2012 018 734
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- R.J. MILEHAM ET AL.: "Patterning of AlN, InN, and GaN in KOH-based solutions", J.
VAC. SCI. TECHNOL., vol. 14, no. 3, 30 June 1998 (1998-06-30), pages 836-839, DOI:
http://dx.doi.org/10.1116/1.580399
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