| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
12.06.2012 US 201261658774 P 16.10.2012 US 201213653239 17.01.2013 US 201313744101
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| (43) |
Date of publication of application: |
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15.04.2015 Bulletin 2015/16 |
| (60) |
Divisional application: |
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17153007.4 |
| (73) |
Proprietor: Taiwan Semiconductor Manufacturing Company, Ltd |
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Hsinchu 300-78 (TW) |
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| (72) |
Inventors: |
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- XU, Haibo
San Diego, California 92128 (US)
- CHINNATHAMBI, Gopinath Murali
San Diego, California 92128 (US)
- GELL, David
San Diego, California 92128 (US)
- STANWOOD, Kenneth L.
San Diego, California 92128 (US)
- COLBAN, Erik
San Diego, California 92128 (US)
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| (74) |
Representative: Keane, Paul Fachtna |
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FRKelly
27 Clyde Road Dublin D04 F838 Dublin D04 F838 (IE) |
| (56) |
References cited: :
WO-A1-2010/112074 US-A1- 2007 268 860
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WO-A2-2006/136926 US-A1- 2010 002 692
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