(19)
(11) EP 2 862 206 A2

(12)

(88) Date of publication A3:
08.05.2014

(43) Date of publication:
22.04.2015 Bulletin 2015/17

(21) Application number: 13803800.5

(22) Date of filing: 12.06.2013
(51) International Patent Classification (IPC): 
H01L 33/00(2010.01)
H01L 33/04(2010.01)
H01L 29/15(2006.01)
(86) International application number:
PCT/US2013/045482
(87) International publication number:
WO 2013/188574 (19.12.2013 Gazette 2013/51)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 14.06.2012 US 201261659944 P
22.06.2012 US 201261662918 P
11.03.2013 US 201313794372
11.03.2013 US 201313794327
11.03.2013 US 201313794285

(71) Applicant: Tivra Corporation
Pleasant Hill, California 94602 (US)

(72) Inventors:
  • DE, Indranil
    Mountain View, California 94043 (US)
  • MACHUCA, Francisco
    Oakland, California 94602 (US)

(74) Representative: Viering, Jentschura & Partner Patent- und Rechtsanwälte 
Grillparzerstrasse 14
81675 München
81675 München (DE)

   


(54) MULTILAYER SUBSTRATE STRUCTURE AND METHOD AND SYSTEM OF MANUFACTURING THE SAME