METHOD AND APPARATUS FOR THE FABRICATION OF NANOSTRUCTURES, NETWORK OF INTERCONNECTED NANOSTRUCTURES AND NANOSTRUCTURE - Patent 2877608

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EP 2 877 608 A1

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(43)	Date of publication:
	03.06.2015 Bulletin 2015/23

(21)	Application number: 13756493.6

(22)	Date of filing: 04.09.2013

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International Patent Classification (IPC):

C23C 14/14^(2006.01)
H01L 21/02^(2006.01)
B82Y 40/00^(2011.01)

C23C 16/24^(2006.01)
H01L 29/06^(2006.01)

(86)	International application number:
	PCT/EP2013/068252

(87)	International publication number:
	WO 2014/037380 (13.03.2014 Gazette 2014/11)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME

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Priority:

04.09.2012 WO PCT/EP2012/067183

(71)	Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften
	80539 Munich (DE)

(72)	Inventor:
	WANG, Zumin 70563 Stuttgart (DE)

(74)	Representative: Manitz, Finsterwald & Partner GbR
	Martin-Greif-Strasse 1 80336 München 80336 München (DE)

(54)	METHOD AND APPARATUS FOR THE FABRICATION OF NANOSTRUCTURES, NETWORK OF INTERCONNECTED NANOSTRUCTURES AND NANOSTRUCTURE