(19)
(11) EP 2 883 239 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
14.02.2018 Bulletin 2018/07

(45) Mention of the grant of the patent:
25.10.2017 Bulletin 2017/43

(21) Application number: 13802420.3

(22) Date of filing: 24.09.2013
(51) International Patent Classification (IPC): 
H01L 21/04(2006.01)
(86) International application number:
PCT/IB2013/002112
(87) International publication number:
WO 2014/060804 (24.04.2014 Gazette 2014/14)

(54)

MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE

VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERBAUELEMENTS

PROCÉDÉ DE FABRICATION D'UN DISPOSITIF À SEMI-CONDUCTEUR

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(30) Priority: 19.10.2012 JP 2012231547

(43) Date of publication of application:
17.06.2015 Bulletin 2015/25

(73) Proprietor: TOYOTA JIDOSHA KABUSHIKI KAISHA
Toyota-shi, Aichi, 471-8571 (JP)

(72) Inventors:
  • FUJIWARA, Hirokazu
    Toyota-shi, Aichi-ken, 471-8571 (JP)
  • SOEJIMA, Narumasa
    Nagakute-shi, Aichi-ken, 480-1192 (JP)

(74) Representative: Kuhnen & Wacker 
Patent- und Rechtsanwaltsbüro Prinz-Ludwig-Straße 40A
85354 Freising
85354 Freising (DE)


(56) References cited: : 
DE-A1-102007 029 829
US-A1- 2012 228 630
 JP-A- 2002 093 742
US-B1- 6 759 683
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).