(19)
(11) EP 2 887 468 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
02.09.2015 Bulletin 2015/36

(43) Date of publication A2:
24.06.2015 Bulletin 2015/26

(21) Application number: 14198853.5

(22) Date of filing: 18.12.2014
(51) International Patent Classification (IPC): 
H01S 5/183(2006.01)
H01S 5/042(2006.01)
H01S 5/022(2006.01)
H01S 5/062(2006.01)
G04F 5/14(2006.01)
H01S 5/32(2006.01)
H01S 5/0687(2006.01)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 20.12.2013 JP 2013263463

(71) Applicant: Seiko Epson Corporation
Tokyo 163 (JP)

(72) Inventors:
  • Takenaka, Satoshi
    Nagano 392-8502 (JP)
  • Kurachi, Yuji
    Nagano 392-8502 (JP)
  • Ono, Shoji
    Nagano 392-8502 (JP)

(74) Representative: Hoffmann Eitle 
Patent- und Rechtsanwälte PartmbB Arabellastraße 30
81925 München
81925 München (DE)

   


(54) Vertical cavity surface emitting laser and atomic oscillator


(57) A vertical cavity surface emitting laser (100) includes: a laminated body; an insulation layer (70) which is provided over at least a portion of the laminated body; an electrode (82) of which at least a portion is provided over the laminated body; a pad (84); and a wiring (86) which electrically connects the electrode and the pad, wherein the laminated body includes a first mirror layer (20), an active layer (30), and a second mirror layer (40), in a plan view, the laminated body (2) includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion, in the plan view, the electrode is provided so as to cover at least a portion of the resonance portion, in the plan view, a width of the wiring (86) is greater than a width of the first distortion imparting portion and is smaller than a width of the electrode (82). The non-circular shape of the mesa (2) and lateral oxidation of the mirror layers with high Al content (60,62) being part of the mesa (2) together with the non-circular shape of the resin layer results in a stress induced preferred polarisation of the VCSEL emission.







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