(19)
(11) EP 2 897 767 A1

(12)

(43) Date of publication:
29.07.2015 Bulletin 2015/31

(21) Application number: 13838975.4

(22) Date of filing: 17.09.2013
(51) International Patent Classification (IPC): 
B24D 3/34(2006.01)
C09C 1/68(2006.01)
C09K 3/14(2006.01)
(86) International application number:
PCT/US2013/060022
(87) International publication number:
WO 2014/047014 (27.03.2014 Gazette 2014/13)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME

(30) Priority: 21.09.2012 US 201261703815 P

(71) Applicant: 3M Innovative Properties Company
Saint Paul, MN 55133-3427 (US)

(72) Inventors:
  • QIAN, Julie, Y.
    Saint Paul, MN 55133-3427 (US)
  • JOSEPH, William, D.
    Saint Paul, MN 55133-3427 (US)
  • LOPER, Stephen, C.
    Saint Paul, MN 55133-3427 (US)

(74) Representative: Isarpatent 
Patentanwälte Behnisch Barth Charles Hassa Peckmann & Partner mbB Friedrichstrasse 31
80801 München
80801 München (DE)

   


(54) INCORPORATING ADDITIVES INTO FIXED ABRASIVE WEBS FOR IMPROVED CMP PERFORMANCE