(19)

(11)

EP 2 898 545 A2

(12)

(88) Date of publication A3: 18.09.2014 (43) Date of publication: 29.07.2015 Bulletin 2015/31 (21) Application number: 13756043.9 (22) Date of filing: 22.08.2013

(51) International Patent Classification (IPC):  H01L 31/18(2006.01) (86) International application number: PCT/EP2013/067456 (87) International publication number: WO 2014/044482 (27.03.2014 Gazette 2014/13)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 24.09.2012 US 201261704954 P (71) Applicant: IMEC VZW 3001 Leuven (BE)	(72) Inventor: KUZMA FILIPEK, Izabela B-3001 Leuven (BE) (74) Representative: Bird Goën & Co  Wetenschapspark Arenberg Gaston Geenslaan 9 3001 Heverlee 3001 Heverlee (BE)