| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
| (30) |
Priority: |
28.09.2012 US 201261707473 P
|
| (43) |
Date of publication of application: |
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05.08.2015 Bulletin 2015/32 |
| (73) |
Proprietor: CSEM Centre Suisse d'Electronique et de
Microtechnique SA - Recherche et Développement |
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2002 Neuchâtel (CH) |
|
| (72) |
Inventors: |
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- JOSE JAMES, Rony
6055 Alpanach Dorf (CH)
- SPINOLA DURANTE, Guido
6003 Luzern (CH)
- BOSSHARD, Christian
4415 Lansen (CH)
|
| (74) |
Representative: Gevers SA |
|
Rue des Noyers 11 2000 Neuchâtel 2000 Neuchâtel (CH) |
| (56) |
References cited: :
WO-A2-2012/015756 US-A1- 2003 071 283
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US-A- 5 738 270
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|
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- A. FAN ET AL: "Copper Wafer Bonding", ELECTROCHEMICAL AND SOLID-STATE LETTERS, vol.
2, no. 10, 1 January 1999 (1999-01-01), page 534, XP055088560, ISSN: 1099-0062, DOI:
10.1149/1.1390894
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