(19)

(11)

EP 2 906 736 A1

(12)

(43) Date of publication: 19.08.2015 Bulletin 2015/34 (21) Application number: 13845366.7 (22) Date of filing: 04.10.2013

(51) International Patent Classification (IPC):  C23C 14/34(2006.01) (86) International application number: PCT/US2013/063504 (87) International publication number: WO 2014/058741 (17.04.2014 Gazette 2014/16)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME (30) Priority: 09.10.2012 US 201261711691 P (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95054 (US)	(72) Inventor: HOSOKAWA, Aki Sunnyvale, California 94085 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)